Triaxis Magnetoresistive (MR) sensor using permalloy plate of distorting magnetic field

Suzuki M., Fukutani T., Hirata T., Aoyagi S., Shingubara S., Tajiri H., Yoshikawa Y., Nagahata T.
Kansai University, Osaka, Japan; ROHM Co., Ltd., Kyoto, Japan

Abstract: This paper proposes a triaxis magnetoresistive (MR) sensor of detecting not only x- and y-axes magnetic field intensities but also z-axis one, where all fields are based on the sensor coordinate system. Namely, not only azimuth but also angle of elevation of the sensor can be detected from triaxis components of geomagnetic field. The principle is as follows: a permalloy (FeNi) plate is stood aside MR element. The plate distorts magnetic field and generates x- (or y-) component from originally z-directional field. So, the resistance of MR element changes in proportional to z-axis field intensity, provided that other axes intensities are kept constant. By contriving a processing circuit, three axes components can be separately detected. ©2010 IEEE.

Year: 2010
Source title: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Art. No.: 5442317
Page : 671-674
Link: Scorpus Link
Document Type: Conference Paper
Source: Scopus
Authors with affiliations:

1. Suzuki, M., Kansai University, Osaka, Japan
2. Fukutani, T., Kansai University, Osaka, Japan
3. Hirata, T., Kansai University, Osaka, Japan
4. Aoyagi, S., Kansai University, Osaka, Japan
5. Shingubara, S., Kansai University, Osaka, Japan
6. Tajiri, H., ROHM Co., Ltd., Kyoto, Japan
7. Yoshikawa, Y., ROHM Co., Ltd., Kyoto, Japan
8. Nagahata, T., ROHM Co., Ltd., Kyoto, Japan

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